FOUP Sensor is installed in LoadPort, STB, Stocker, etc. among semiconductor line facilities, and is a sensor that detects WaferCarrier (FOUP/FOSB/POD/MAC) by contact.
Because it is a contact type, it can stably detect the presence or absence of objects without being affected by ambient light noise or electromagnetic wave noise, and it uses an internal sensor optical system to guarantee a life span of more than 5 million times.
- CTS-STBS-Ax(NPN)
- CTS-STBS-Cx(PNP)
- CTS-STKS-Ax(NPN)